|
规格型号 |
|
SR1000 |
SR2000 |
|
测量范围 |
X轴 |
100~220mm |
|
|
Z轴 |
320~620mm |
||
|
Z1轴 |
±420μm/65536:1 |
±620μm/262144:1 |
|
|
粗糙度参数 |
Z1线性精度 |
≤±（7mm+3.5%） |
≤±（5mm+2.8%） |
|
重复性 |
1δ≤2nm |
1δ≤1nm |
|
|
截止波长 |
0.025、0.08、0.25、0.8、2.5、8mm |
||
|
评定长度 |
λcX2、3、4、5、6、7 |
||
|
残值噪声 |
≤0.012μm |
≤0.005μm |
|
|
驱动速度 |
X轴 |
0.1~10mm/s |
0.05~15mm/s |
|
Z轴 |
0.5~10mm/s |
0.2~15mm/s |
|
|
测量功能 |
粗糙度 |
粗糙度功能：Ra、Rp、Rv、Rz、Rz（jis）、R3z、RzDIN、Rzj、Rmax、Rc、Rt、Rq、Rsk、Rku、Rsm、Rs、R△q、Rk、Rpk、Rvk、Mr1、Mr2、Rmr 波纹度参数：Wa、Wt、Wp、Wv、Wz、Wq、Wsm、Wsk、Wku、Wmr 原始轮廓参数：Pa、Pt、Pp、Pv、Pz、Pq、Psm、Psk、Pku、Pmr |
|
